2025 (Current Year) Faculty Courses School of Materials and Chemical Technology Department of Chemical Science and Engineering Graduate major in Energy Science and Informatics
Introduction to Processes of Semiconductors
- Academic unit or major
- Graduate major in Energy Science and Informatics
- Instructor(s)
- Hiroyuki Wada
- Class Format
- Lecture (Face-to-face)
- Media-enhanced courses
- -
- Day of week/Period
(Classrooms) - 5-6 Mon
- Class
- -
- Course Code
- ESI.H410
- Number of credits
- 100
- Course offered
- 2025
- Offered quarter
- 2Q
- Syllabus updated
- Mar 19, 2025
- Language
- English
Syllabus
Course overview and goals
It is important to understand the basic properties of semiconductors, so the instructor in this course will base the lecture on application techniques and manufacturing methods, in a manner that beginners can also understand. In the first half of the course, students will learn about thin-film manufacturing, photolithography, and etching as important steps for element manufacturing made use of semiconductor properties, and gain an understanding of utilizations of semiconductor properties. At the same time students will deepen their understanding of substances used for semiconductors. In the latter half, students will learn about the general electrical properties of silicon and compound semiconductors, including the newest technology, while also expanding their knowledge of the luminescent properties of wide bandgap semiconductors, etc. Students will also acquire knowledge related to analysis methods for semiconductor properties.
Students in this course will learn about the electrical properties, luminescent properties, and mechanical properties of semiconductors as well as examples of applications that make use of them, while also learning manufacturing methods for semiconductor elements from the ground up. Students will also systematically learn about all sorts of semiconductor properties in a way that even beginners in other fields will be able to understand the content in depth. Students will also get a grasp of usage methods and related fields, encouraging a solid foundational understanding.
Course description and aims
By the end of this course, students will have the following abilities:
1) To explain the difference between p-type and n-type semiconductor materials.
2) To explain semiconductor processes (coating, photolithography, etching).
3) To explain overview and principles of semiconductor properties.
Keywords
Semiconductor, coating, lithography, etching, electric property, optical property, mechanical property
Competencies
- Specialist skills
- Intercultural skills
- Communication skills
- Critical thinking skills
- Practical and/or problem-solving skills
Class flow
At the beginning of each class, the previous lecture is reviewed (exercise problems). At the end of class, contents of the lecture is summarized. 'Required learning' is needed to be completed outside of the classroom for preparation and review purposes.
Course schedule/Objectives
| Course schedule | Objectives | |
|---|---|---|
| Class 1 | Semiconductor materials | Properties of semiconductor materials |
| Class 2 | Semiconductor process (Coating) | Methods to fabricate thin film on a substrate |
| Class 3 | Semiconductor process (Photolithography) | Methods to fabricate a pattern of resist on a substrate |
| Class 4 | Semiconductor process (Etching) | Methods to remove some part of material |
| Class 5 | Semiconductor process (Other processes) | Oxidation, diffusion, ion implantation and so on |
| Class 6 | Electric properties/Optical properties and applications of semiconductor materials | Properties of n-type and p-type of semiconductor material, Emission and absorption of semiconductor material |
| Class 7 | Examination | Examination |
Study advice (preparation and review)
To enhance effective learning, students are encouraged to spend approximately 100 minutes preparing for class and another 100 minutes reviewing class content afterwards (including assignments) for each class.
They should do so by referring to textbooks and other course material.
Textbook(s)
N/A
Reference books, course materials, etc.
Semiconductor devices -Physics and Technology- S. M. Sze
Evaluation methods and criteria
Mainly, the examination (90 %) will be used for evaluation. Attendance and exercises (10%) will also be taken into account.
Related courses
- N/A
Prerequisites
N/A