2025 (Current Year) Faculty Courses School of Engineering Department of Electrical and Electronic Engineering Graduate major in Electrical and Electronic Engineering
Technology Analytics on Advanced LSIs
- Academic unit or major
- Graduate major in Electrical and Electronic Engineering
- Instructor(s)
- Hitoshi Wakabayashi / Kazuo Tsutsui / Takanori Shirokura
- Class Format
- Lecture/Exercise (Others)
- Media-enhanced courses
- -
- Day of week/Period
(Classrooms) - Intensive
- Class
- -
- Course Code
- EEE.C501
- Number of credits
- 110
- Course offered
- 2025
- Offered quarter
- 2Q
- Syllabus updated
- Mar 28, 2025
- Language
- English
Syllabus
Course overview and goals
It is very important to understand the large-scale integrated circuit (VLSI) technology to support the modern society in the underlying. Especially, a comprehensive understanding of manufacturing technology is going to be discussed mainly using cross-sectional transmission electron micrographs of LSIs.
Course description and aims
By course of this lecture, the goals is to understand the large-scale integrated circuits that support modern society. In addition, we aim to be able to apply to the actual integrated circuit design.
Student learning outcomes
実務経験と講義内容との関連 (又は実践的教育内容)
The following practical experience is all related to the lecture content. In a half of this lecture, a teaching faculty member with 20 years of practical experiences used to be belonging to multiple companies in the field of device technologies for the VLSI Technology will provide valuable contents on basics and applications in the Technology Analytics on Advanced LSIs, based on his practical experiences.
/ Advanced CMOS research and development at NEC Corporation (April 1993 to March 2006)
/ Advanced CMOS and semiconductor device research and development at Sony Corporation (April 2006 to December 2012)
Keywords
Large-scale integrated circuit (VLSI) technology, CMOS integrated circuit, scaling technology, miniaturization technology, exposure technology, film formation technology, etching technology, CMP technology, memory device technology, sensor technology, actuator technology, wiring technology, passive device technology, packaging technology
Competencies
- Specialist skills
- Intercultural skills
- Communication skills
- Critical thinking skills
- Practical and/or problem-solving skills
Class flow
Intensive lectures (on the afternoon of August 7th, all day on the 8th, all day on the 9th, and in the before-noon of the 10th (possibly held in Suzukakedai due to the schedule of rolling blackouts)) will include analysis, research, discussion, presentations and discussions based on the provided materials. Please bring your own PC.
Course schedule/Objectives
| Course schedule | Objectives | |
|---|---|---|
| Class 1 | Day1 pm Class 1 Introduction: LSIs and Analysis methods Class 2 Logic LSI: Lecture and preparation of presentation Day 2 Class 3 Logic LSI: Presentations and discussions Class 4 Memory: Lecture and preparation of presentation Day 3 Class 5 Memory: Presentations and discussions Class 6 Sensor: Lecture and preparation of presentation Day 4 am Class 7 Sensor: Presentations and discussions Class 8 Conclusions | Understanding advanced LSI technology |
Study advice (preparation and review)
Textbook(s)
Fundamentals of Modern VLSI Devices, 2nd Edition, Yuan Taur and Tak H. Ning, Cambridge University Press
Semiconductor Manufacturing Technology, Michael Quirk and Julian Serda, Prentice Hall
Nanoelectronics and Information Technology, Rainer Waser, Wilery-VCH
Reference books, course materials, etc.
Find uploaded data on the T2SCHOLA and/or T2Box by yourself.
Evaluation methods and criteria
No Examination. Evaluation will be based on the content of the presentation and the report given in the final class.
Related courses
- EEE.C341 ： Integrated Circuit Technology
- ZUS.L201 ： Basic Integrated Circuits
- ICT.I303 ： Integrated Circuit Design
Prerequisites
None
Other
This is a course related to Integrated Green-niX.
Students will take this course together with students from educational institutions participating in the Integrated Green-niX Consortium for Research and Human-Resource Development (Green-niX).
There is also the possibility to set a maximum capacity.
https://www.knc.titech.ac.jp/gnx/igx_college/index.html