2024 Faculty Courses School of Engineering Department of Electrical and Electronic Engineering Graduate major in Electrical and Electronic Engineering

Special Lecture I on Integrated Green-niX

Academic unit or major: Graduate major in Electrical and Electronic Engineering
Instructor(s): Takanori Shirokura / Hitoshi Wakabayashi / Kazuo Tsutsui / Tenko Yamashita / Katsuhiko Nishiguchi / Tsung Ju Lin / Miyako Matsui / Tomoya Saito / Yusuke Oike / Shun Sasaki
Class Format: Lecture
Media-enhanced courses: -
Day of week/Period (Classrooms): 7-8 Tue
Class: -
Course Code: EEE.D443
Number of credits: 100
Course offered: 2024
Offered quarter: 1Q
Syllabus updated: Mar 14, 2025
Language: English

Syllabus

Course overview and goals

This course provides a comprehensive overview of technological trends in integrated semiconductor devices, which support modern society, from the perspectives of devices, processes, circuit design, and applications. Specifically, students will first learn about the current status and future prospects of logic devices. Next, students will learn about scaling and low power consumption technologies to improve the performance of cutting-edge logic devices. In advanced processes, etching and cleaning technology are focused, which are the key to advanced logic devices. Furthermore, as a design technique for digital circuits, memory-embedded circuits are explained, and examples of applications using cutting-edge semiconductor devices are introduced. Finally, silicon technologies are overviewed from the viewpoint of wafer technology.

These lectures will be provided by instructors from various companies that are leading the semiconductor industry. Through this course, students will learn about the various technological elements that support logic semiconductor devices and the efforts of each company, and will understand the relationship between their own field of expertise and the semiconductor industry, and will develop their ability to develop technology with an eye on the market.

Course description and aims

Through this course, the goal is to understand cutting-edge technology trends in semiconductor devices and acquire the skills to develop technology from a bird's-eye view with market awareness in mind. In addition, we aim to gain an understanding of the diverse career paths in the semiconductor industry through experiences in semiconductor technology development provided by corporate instructors from various specialized fields.

Student learning outcomes

実務経験と講義内容との関連 (又は実践的教育内容)

Lectures working in semiconductor-related companies will utilize their practical experience to provide systematic education on design, manufacturing and applications of advanced logic devices based on silicon technology.

Keywords

semiconductor, VLSI, wafer, logic devices, cleaning technology, etching technology, SoC, circuit design, image sensor

Competencies

Specialist skills
Intercultural skills
Communication skills
Critical thinking skills
Practical and/or problem-solving skills

Class flow

Mainly face-to-face lectures with online participation from another universities.
Experts in cutting-edge logic devices, process technology, circuit design, and applications will be invited as lecturers, and the lectures will be held in an omnibus format with lectures and reports.

Course schedule/Objectives

	Course schedule	Objectives
Class 1	Advanced logic devices (Structures, Scaling technology) [IBM USA]	Understanding the technological advances driving the miniaturization of advanced logic devices.
Class 2	New-functionality devices for future electronics (Low-power-consumption technology)　[NTT]	Understanding new functional device technology for low power consumption technology.
Class 3	Advanced semiconductor process 1 (Etching technology)　[Hitachi High-Tech]	Understanding the evolution of etching processing technology through device fabrication process technology.
Class 4	Advanced semiconductor process 2 (Cleaning technology)　[SCREEN Semiconductor Solutions]	Understanding cleaning technology that is becoming more sophisticated with device manufacturing process technology.
Class 5	Technology trends　of IP development in embedded nonvolatile memory for MCUs　[Renesas Electronics Corp.]	Understanding embedded nonvolatile memory in digital integrated circuits.
Class 6	Semiconductor products, market (Image Sensor)　[Sony Semiconductor Solutions]	Understanding image sensors, which is an important application along with LSI.
Class 7	Current situation and prospects of Si technology from the viewpoints of wafer technology　[SUMCO]	Understanding wafer technology within the semiconductor industry.

Study advice (preparation and review)

To enhance effective learning, students are encouraged to spend approximately 100 minutes preparing for class and another 100 minutes reviewing class content afterwards (including assignments) for each class.
They should do so by referring to textbooks and other course material.

Textbook(s)

none

Reference books, course materials, etc.

Taur and Ning: Fundamentals of Modern VLSI Devices (ISBN: 978-4621085813)
Sze: Semiconductor Devices: Physics and Technology (ISBN: 978-4782855508)
West, Harris: Integrated circuit design (ISBN: 978-0321696946)
Texts by each lecturer

Evaluation methods and criteria

Reports for each class: 100%

Related courses

EEE.C441 ： VLSI Technology I
EEE.C442 ： VLSI Technology II
EEE.D411 ： Semiconductor Physics
EEE.D592 ： Advanced Topics on Material Analysis and Basics of Plasma Processing for Nano Devices

Prerequisites

It is desirable to have taken undergraduate lectures on semiconductor devices and electronic circuits.

Contact information (e-mail and phone) Notice : Please replace from ”[at]” to ”@”(half-width character).

Kazuo Tsutsui（tsutsui.k.ac[at]m.titech.ac.jp）

Office hours

Contact by e-mail in advance to schedule an appointment.

Other

Lecture in charge of each session
Class 1：IBM, US　Yamashita Tenko, Class 2：NTT　Nishiguchi Katsuhiko, Class 3：Hitachi High-Tech　Matsui Miyako, Class 4：SCREEN Semiconductor Solutions　Lin Tsung Ju, Class 5：Renesas Electronics Corp.　Saito Tomoya, Class 6：SONY Semiconductor Solutions　Oike Yusuke, Class 7：SUMCO　Sasaki Shun.

This lecture is also held as an activity of the Integrated Green-niX College in the Integrated Green-niX research and human resource development, supported by MEXT Initiative to Establish Next-generation Novel Integrated Circuits Centers (X-NICS) JPJ011438.