2024 Faculty Courses School of Engineering Undergraduate major in Mechanical Engineering
Fundamentals of Micro and Nano Machining
- Academic unit or major
- Undergraduate major in Mechanical Engineering
- Instructor(s)
- Joon-Wan Kim / Tadahiko Shinshi / Takatoki Yamamoto / Takasi Nisisako
- Class Format
- Lecture (Face-to-face)
- Media-enhanced courses
- -
- Day of week/Period
(Classrooms) - 1-2 Mon
- Class
- -
- Course Code
- MEC.J331
- Number of credits
- 100
- Course offered
- 2024
- Offered quarter
- 1Q
- Syllabus updated
- Mar 14, 2025
- Language
- Japanese
Syllabus
Course overview and goals
This course covers applications and various microfabrication methods to design and fabricate MEMS/NEMS devices. Methods include, patterning based on photolithography, deposition, etching (wet & dry), nanofabrication technologies, next-generation fabrication technologies, and the physics behind them. Enrollment preference is given to any students.
Course description and aims
By the end of this course, students will be able to:
1) Acquire the baseline knowledge about the theory and methods of various microfabrication techniques based on photolithography, and the ability to apply for developing the MEMS/NEMS devices.
2) Design the basic level of MEMS/NEMS devices.
Keywords
MEMS, NEMS, Micromachine, Nanomachine, Photolithography, Deposition, Wet&Dry etching, Nanofabrication, Next-generation fabrication technology
Competencies
- Specialist skills
- Intercultural skills
- Communication skills
- Critical thinking skills
- Practical and/or problem-solving skills
- This class aims at learning 6 and 7 of learning objective.
Class flow
Each theme every week.
Course schedule/Objectives
| Course schedule | Objectives | |
|---|---|---|
| Class 1 | Overview of MEMS/NEMS | Study what are MEMS?, and the applications. |
| Class 2 | Patterning | Understand the patterning method base on photolithography. |
| Class 3 | DepositionStudy various deposition methods. | Understand the various deposition methods. |
| Class 4 | Wet etching | Understand what the wet etching is. |
| Class 5 | Dry etching | Understand what the dry etching is. |
| Class 6 | Nano-fabrication | Study nanofabrication methods. |
| Class 7 | Integration of various micro and nano fabrication processes | Learn the technology that integrates various micro and nano fabrication processes. |
Study advice (preparation and review)
To enhance effective learning, students are encouraged to spend approximately 100 minutes preparing for class and another 100 minutes reviewing class content afterwards (including assignments) for each class.
They should do so by referring to textbooks and other course material.
Textbook(s)
Japanese printed material only
Reference books, course materials, etc.
Japanese book only.
Evaluation methods and criteria
The evaluation is done through a final exam. However, if the final exam cannot be held (for example, due to the coronavirus pandemic), it can be replaced with a report, etc.
Related courses
- MEC.G311 ： Introduction to Manufacturing Engineering
- MEC.G331 ： Production System Engineering
Prerequisites
None