2021 Faculty Courses School of Engineering Department of Mechanical Engineering Graduate major in Mechanical Engineering
Ultra-precision Measurement
- Academic unit or major
- Graduate major in Mechanical Engineering
- Instructor(s)
- Hayato Yoshioka / Takeshi Hatsuzawa / Seiichiro Hara
- Class Format
- Lecture
- Media-enhanced courses
- -
- Day of week/Period
(Classrooms) - 5-6 Mon
- Class
- -
- Course Code
- MEC.J431
- Number of credits
- 100
- Course offered
- 2021
- Offered quarter
- 3Q
- Syllabus updated
- Jul 10, 2025
- Language
- English
Syllabus
Course overview and goals
This lecture focuses in understanding fundamentals, data processing, and practical method, like stylus method, scanning probe microscopes, LASER metrology, and motion accuracy in ultra precision form metrology.
Course description and aims
By the end of this course, students will be able to:
1) understand the principle and items of ultra precision metrology.
2) understand the practical method in ultra precision form metrology,
3) understand the basic technology of ultra precision metrology.
4) understand the bases to create ultra precision metrology.
Student learning outcomes
実務経験と講義内容との関連 (又は実践的教育内容)
One of the lecturer has 12 years of experience working with the National Research Laboratory of Metrology of the MITI for developing national standards of nanometer length, precision measurement and calibration technology, with practical experience in ultra-precision measurement. The practices and research contents will be reflected in the lecture.
Keywords
Ultra precision form measurement, information processing, ultra precision stylus measurement technique, scanning probe measurement, LASER measurement
Competencies
- Specialist skills
- Intercultural skills
- Communication skills
- Critical thinking skills
- Practical and/or problem-solving skills
Class flow
Lecture on specific topic each time
Course schedule/Objectives
| Course schedule | Objectives | |
|---|---|---|
| Class 1 | Ultra Precise Measurement and Metrology Standards | What's the precise and ultra precise measurements |
| Class 2 | Ultra-precision stylus profilometer and scanning probe microscope | Limitation in physical contact |
| Class 3 | Information processing for ultra-precision measurement | Knowledge for measurement information processing |
| Class 4 | Coordinate measuring system | Analysis and algorithm in size and form evaluation |
| Class 5 | Ultra precision laser measurement(1) | LASER optics |
| Class 6 | Ultra precision laser measurement(2) | Error factors |
| Class 7 | Motion accuracy measurement | What's the motion accuracy |
Study advice (preparation and review)
To enhance effective learning, students are encouraged to spend approximately 100 minutes preparing for class and another 100 minutes reviewing class content afterwards (including assignments) for each class.
They should do so by referring to textbooks and other course material.
Textbook(s)
none
Reference books, course materials, etc.
１）J.M.Rueger;Electronic Distance Measurement, Springer-Verlag(1990)
２）J.S.Bendat and A.G.Piersol;Analysis and Measurement Procedures, John Wiley & Sons,Inc.(1971)
３）J.Feder;Fractals,Plenum Press,N.Y.(1988)
４）M.J.Bx, D.Davies and W.H.Swann;Mathematical and Statistical Techniques,Imperial Chemical IndustriesLtd.
Evaluation methods and criteria
Multiple report submission 100% (Attendance is required for scoring the report tasks)
Related courses
- MEC.J432 ： Mechanism and Control for Ultra-precision Motion
Prerequisites
It is desirable that students have learned “measurement” in mechanical engineering previously.